US 12,237,648 B2
Bi-directional vertical cavity surface emitting lasers
Benjamin Kesler, Sunnyvale, CA (US)
Assigned to Lumentum Operations LLC, San Jose, CA (US)
Filed by Lumentum Operations LLC, San Jose, CA (US)
Filed on Dec. 29, 2023, as Appl. No. 18/399,844.
Application 18/399,844 is a division of application No. 17/453,057, filed on Nov. 1, 2021, granted, now 11,870,217.
Claims priority of provisional application 63/261,697, filed on Sep. 27, 2021.
Claims priority of provisional application 63/261,699, filed on Sep. 27, 2021.
Prior Publication US 2024/0136798 A1, Apr. 25, 2024
Int. Cl. H01S 5/00 (2006.01); H01S 5/183 (2006.01); H01S 5/20 (2006.01); H01S 5/30 (2006.01); H01S 5/34 (2006.01); H01S 5/42 (2006.01)
CPC H01S 5/18397 (2013.01) [H01S 5/18305 (2013.01); H01S 5/18313 (2013.01); H01S 5/18388 (2013.01); H01S 5/2081 (2013.01); H01S 5/3095 (2013.01); H01S 5/3416 (2013.01); H01S 5/426 (2013.01); H01S 5/183 (2013.01); H01S 5/18394 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
growing, on a substrate, a first set of epitaxial layers for a bottom-emitting vertical cavity surface emitting laser (VCSEL), the first set of epitaxial layers comprising:
a first set of mirrors; and
at least one first active layer;
growing, on the first set of epitaxial layers, a second set of epitaxial layers for a top-emitting VCSEL, the second set of epitaxial layers comprising:
a second set of mirrors; and
at least one second active layer; and
etching the second set of epitaxial layers until a surface of the first set of epitaxial layers is exposed,
wherein the top-emitting VCSEL and the bottom-emitting VCSEL are configured to emit light in opposite light emission directions.