US 12,237,639 B2
Hollow-core photonic crystal fiber based broadband radiation generator
John Colin Travers, Edinburgh (GB); Federico Belli, Edinburgh (GB); Malte Christian Brahms, Edinburgh (GB); Andreas Johannes Antonius Brouns, Eindhoven (NL); and Ronald Franciscus Herman Hugers, Best (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
Filed on Dec. 20, 2022, as Appl. No. 18/085,338.
Application 18/085,338 is a continuation of application No. 17/460,430, filed on Aug. 30, 2021, granted, now 11,563,298.
Claims priority of application No. 20194353 (EP), filed on Sep. 3, 2020; application No. 20202720 (EP), filed on Oct. 20, 2020; and application No. 21169105 (EP), filed on Apr. 19, 2021.
Prior Publication US 2023/0144419 A1, May 11, 2023
Int. Cl. G02B 6/02 (2006.01); G02F 1/35 (2006.01); G03F 7/00 (2006.01); H01S 3/067 (2006.01)
CPC H01S 3/06741 (2013.01) [G02B 6/02328 (2013.01); G02F 1/3528 (2021.01); G03F 7/70625 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fiber assembly for a broadband radiation source, the fiber assembly comprising:
a fiber holder holding a plurality of optical fibers that are stacked together; and
at least one fiber clamp configured to apply at least one clamping force to the plurality of optical fibers such that the plurality of optical fibers are stably clamped,
wherein each of the plurality of optical fibers is supported by two contact points and is subject to a force vector that intersects a line formed in-between the two contact points supporting the respective fiber, the force vector being a vector of the combination of all applied force acting on the respective fiber.