| CPC H01L 33/62 (2013.01) [H01L 33/005 (2013.01); H01L 2933/0066 (2013.01)] | 7 Claims | 

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               1. A manufacturing method of an electronic device, comprising: 
            providing a substrate; 
                forming a first compressible layer on the substrate; 
                forming a first bonding pad on the first compressible layer; 
                providing an electronic component; 
                forming a second bonding pad on the electronic component; and 
                bonding the electronic component with the substrate by contacting the second bonding pad with the first bonding pad, 
                wherein a material of the first bonding pad and a material of the second bonding pad are the same. 
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