US 12,237,445 B2
Print process for color conversion layer using porous host or positive photoresist
Hou T. Ng, Campbell, CA (US); Nag B. Patibandla, Pleasanton, CA (US); Giorgio Cellere, Torri di Quartesolo (IT); and Daihua Zhang, Los Altos, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 10, 2022, as Appl. No. 17/692,012.
Claims priority of provisional application 63/160,696, filed on Mar. 12, 2021.
Prior Publication US 2022/0293826 A1, Sep. 15, 2022
Int. Cl. H01L 21/00 (2006.01); B29D 11/00 (2006.01); G02B 5/28 (2006.01); H01L 25/075 (2006.01); H01L 33/50 (2010.01); G03F 7/00 (2006.01); G03F 7/039 (2006.01)
CPC H01L 33/50 (2013.01) [B29D 11/00634 (2013.01); G02B 5/286 (2013.01); H01L 25/0753 (2013.01); G03F 7/0005 (2013.01); G03F 7/039 (2013.01); H01L 2933/0041 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A method of fabricating a multi-color display, comprising:
forming a host matrix over a display having a backplane and an array of light emitting diodes electrically integrated with backplane circuitry of the backplane, wherein the host matrix is sensitive to ultraviolet light and to develop internal porous structures when exposed to light of the light emitting diodes;
activating a first plurality of light emitting diodes in a first plurality of wells to illuminate a portion of the host matrix that is over the first plurality of light emitting diodes to cause the portion of the host matrix to develop internal porous structures;
dispensing a first photo-curable fluid, the first photo-curable fluid including a first color conversion agent;
activating the first plurality of light emitting diodes in the first plurality of wells to illuminate and cure the first photo-curable fluid to form a first color conversion layer over each of the first plurality of light emitting diodes to convert light from the first plurality of light emitting diodes to light of a first color; and
removing an uncured remainder of the first photo-curable fluid.