US 12,237,427 B2
Tuning method for active metamaterials using IGZO Schottky diodes
Yifei Zhang, Jinan (CN); Aimin Song, Jinan (CN); Haotian Ling, Jinan (CN); and Qingpu Wang, Jinan (CN)
Assigned to SHAN DONG UNIVERSITY, Jinan (CN)
Appl. No. 17/753,192
Filed by SHAN DONG UNIVERSITY, Jinan (CN)
PCT Filed Jun. 28, 2020, PCT No. PCT/CN2020/098495
§ 371(c)(1), (2) Date Feb. 23, 2022,
PCT Pub. No. WO2021/051923, PCT Pub. Date Mar. 25, 2021.
Claims priority of application No. 201910893666.7 (CN), filed on Sep. 20, 2019.
Prior Publication US 2022/0278241 A1, Sep. 1, 2022
Int. Cl. H01L 29/872 (2006.01); G02F 1/015 (2006.01); H01L 29/24 (2006.01); H01L 29/47 (2006.01); H01Q 15/00 (2006.01)
CPC H01L 29/872 (2013.01) [G02F 1/0156 (2021.01); H01L 29/247 (2013.01); H01L 29/47 (2013.01); H01Q 15/0086 (2013.01); G02F 2202/30 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A tuning method for active metamaterials using indium-gallium-zinc oxide (IGZO) Schottky diodes, wherein the IGZO Schottky diode comprises substrates, Schottky electrodes, amorphous IGZO active layers, and ohmic electrodes from the bottom up, comprising the following steps:
(i) metamaterials are used as the Schottky electrodes, and the amorphous IGZO active layers are used to fully cover capacitive structures in the metamaterials; the capacitive structures in the metamaterials are bonded to the amorphous IGZO active layers to form Schottky barriers;
the substrates are cleaned with DECON, deionized water, and acetone successively; wherein the DECON is a decontamination agent;
then the substrates are placed into ethanol immediately for cleaning;
finally, the substrates are cleaned with deionized water again and dried by nitrogen gas;
and
(ii) the IGZO Schottky diodes from step (i) are used to tune the metamaterials dynamically.