US 12,237,352 B2
Solid-state imaging element having partition wall disposed between optical filters
Masahiro Mori, Haibara-gun (JP)
Assigned to FUJIFILM Corporation, Tokyo (JP)
Filed by FUJIFILM Corporation, Tokyo (JP)
Filed on May 9, 2022, as Appl. No. 17/739,281.
Application 17/739,281 is a continuation of application No. PCT/JP2020/042704, filed on Nov. 17, 2020.
Claims priority of application No. 2019-212900 (JP), filed on Nov. 26, 2019.
Prior Publication US 2022/0271078 A1, Aug. 25, 2022
Int. Cl. H01L 27/146 (2006.01)
CPC H01L 27/14621 (2013.01) [H01L 27/14685 (2013.01); H01L 27/14645 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A solid-state imaging element comprising:
a support having a photoelectric conversion unit; and
an optical filter provided on a light incident side with respect to the photoelectric conversion unit,
wherein the optical filter has two or more kinds of pixels arranged in a patterned manner and a partition wall disposed between the pixels,
a refractive index of the partition wall with respect to light having a wavelength of 533 nm is 1.10 to 1.30,
a width of the partition wall is 80 to 150 nm,
a refractive index of the pixels with respect to light having a wavelength of 1000 nm is 1.60 to 1.90,
a difference between a thickness of the partition wall and a thickness of pixels adjacent to the partition wall is 200 nm or less,
a difference between the refractive index of the partition wall with respect to light having a wavelength of 533 nm and a refractive index of the pixels adjacent to the partition wall with respect to light having a wavelength of 1000 nm is 0.30 to 0.80, and
the thickness of the partition wall is larger than a thickness of the pixels.