US 12,237,321 B2
Filler cell region with centrally uncut gate segments, semiconductor device including same and method of manufacturing same
Shun Li Chen, Hsinchu (TW); Fei Fan Duan, Hsinchu (TW); and Ting Yu Chen, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu (TW)
Filed on Jun. 17, 2022, as Appl. No. 17/843,770.
Claims priority of provisional application 63/311,355, filed on Feb. 17, 2022.
Prior Publication US 2023/0260985 A1, Aug. 17, 2023
Int. Cl. H01L 27/02 (2006.01); H01L 21/8234 (2006.01); H01L 27/118 (2006.01)
CPC H01L 27/0207 (2013.01) [H01L 21/823437 (2013.01); H01L 27/11807 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A filler cell region in a semiconductor device, the filler cell region comprising:
gate segments extending in a first direction and being free from electrical coupling to active or passive circuitry within the filler cell region;
relative to the first direction:
a majority of first ends of the gate segments substantially aligning with a first reference line extending in a second direction perpendicular to the first direction, the first reference line being parallel and proximal to a top boundary of the filler cell region;
a majority of second ends of the gate segments substantially aligning with a second reference line extending in the second direction and being parallel and proximal to a bottom boundary of the filler cell region;
first and second ones of the gate segments extending continuously across the filler cell region; and
third & fourth and fifth & sixth ones of the gate segments being correspondingly coaxial and separated by corresponding gate-gaps located centrally in the filler cell region;
relative to the second direction, the first and second gate segments being between the third & fourth gate segments and the fifth & sixth gate segments; and
relative to the first direction:
a first end of the first gate segment extending to the top boundary; and
a second end of the second gate segment extending to the bottom boundary.