| CPC H01L 23/5381 (2013.01) [H01L 23/49816 (2013.01); H01L 23/49822 (2013.01); H01L 23/49838 (2013.01); H01L 23/5383 (2013.01); H01L 23/5386 (2013.01); H01L 24/16 (2013.01); H01L 24/17 (2013.01); H01L 25/0655 (2013.01); H01L 23/5389 (2013.01); H01L 2224/1601 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/16237 (2013.01); H01L 2224/1703 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/1432 (2013.01); H01L 2924/1436 (2013.01); H01L 2924/30105 (2013.01); H01L 2924/30205 (2013.01)] | 24 Claims | 

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               1. A multi-chip module comprising: 
            a routing substrate including an upper metal routing layer, an intermediate metal routing layer, and a lower metal routing layer; 
                a first die mounted on the routing substrate; 
                a second die mounted on the routing substrate diagonally adjacent to the first die; 
                a third die mounted on the routing substrate laterally opposite to the first die, wherein a first die edge of the first die faces a third die edge of the third die; 
                a first die-to-die routing in the routing substrate connecting the first die to the second die, wherein the first die-to die routing spans a first longitudinal distance in one or more metal routing layers of the routing substrate; and 
                a second die-to-die routing connecting the first die to the third die, wherein the second die-to-die routing spans a second longitudinal distance in a single metal routing layer of the routing substrate that is greater than the first longitudinal distance. 
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