US 12,237,236 B2
Cartridge for inspection
Gholamreza Chaji, Waterloo (CA); Ehsanollah Fathi, Waterloo (CA); Hossein Zamani Siboni, Waterloo (CA); and David Hwang, Waterloo (CA)
Assigned to VueReal Inc., Waterloo (CA)
Appl. No. 18/005,418
Filed by VueReal Inc., Waterloo (CA)
PCT Filed Jul. 15, 2021, PCT No. PCT/CA2021/050977
§ 371(c)(1), (2) Date Jan. 13, 2023,
PCT Pub. No. WO2022/011473, PCT Pub. Date Jan. 20, 2022.
Claims priority of provisional application 63/051,931, filed on Jul. 15, 2020.
Prior Publication US 2023/0260856 A1, Aug. 17, 2023
Int. Cl. H01L 21/66 (2006.01); G01R 1/04 (2006.01); H01L 23/28 (2006.01); H01L 23/48 (2006.01); H01L 29/15 (2006.01)
CPC H01L 22/32 (2013.01) [G01R 1/0416 (2013.01); H01L 23/28 (2013.01); H01L 23/481 (2013.01); H01L 29/157 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method of forming test electrodes for vertical microdevice, the method comprising:
forming a microdevice on a microdevice substrate;
the microdevice having a hidden contact on a surface facing away from the microdevice substrate;
forming a protection layer to cover a part of the hidden contact;
forming a dielectric layer to cover a surface of the microdevice and at least part of the microdevice sidewall, wherein the dielectric layer covers common layers that are on top of the microdevice substrate;
forming an opening to provide access to the hidden contact; and
forming a first electrode to provide access to the hidden contact outside of the microdevice.