US 12,237,212 B2
Implantable all diamond microelectrode and fabrication method
Wen Li, Okemos, MI (US); Yue Guo, Lansing, MI (US); Thomas Schuelke, Pinckney, MI (US); Michael Becker, East Lansing, MI (US); Robert Rechenberg, Vermontville, MI (US); and Cory Rusinek, Okemos, MI (US)
Assigned to Board of Trustees of Michigan State University, East Lansing, MI (US); and Fraunhofer USA, East Lansing, MI (US)
Appl. No. 16/650,485
Filed by Board of Trustees of Michigan State University, East Lansing, MI (US); and Fraunhofer USA, East Lansing, MI (US)
PCT Filed Sep. 27, 2018, PCT No. PCT/US2018/053168
§ 371(c)(1), (2) Date Mar. 25, 2020,
PCT Pub. No. WO2019/067748, PCT Pub. Date Apr. 4, 2019.
Claims priority of provisional application 62/563,980, filed on Sep. 27, 2017.
Prior Publication US 2020/0303236 A1, Sep. 24, 2020
Int. Cl. A61B 18/14 (2006.01); A61B 5/00 (2006.01); A61N 1/05 (2006.01); C23C 16/27 (2006.01); H01L 21/763 (2006.01); H01L 29/04 (2006.01); A61B 5/025 (2006.01)
CPC H01L 21/763 (2013.01) [A61N 1/05 (2013.01); C23C 16/27 (2013.01); H01L 29/04 (2013.01); A61B 5/025 (2013.01); A61B 2562/0209 (2013.01); A61B 2562/125 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An electrode comprising:
a contact pad comprising boron-doped polycrystalline diamond (BDD);
a fiber core comprising BDD extending longitudinally from the contact pad from a proximal end that is in direct contact with the contact pad to an opposing distal end; and
a polycrystalline diamond (PCD) cladding that coats and hermetically seals a first portion of the contact pad and a second portion of the fiber core, wherein
a third portion of the contact pad and a fourth portion of the fiber core at the distal end of the fiber core are not coated and hermetically sealed by the PCD cladding, and
the fiber core and the PCD cladding collectively define a longitudinal shank having a width of greater than or equal to about 0.3 μm and less than or equal to about 45 μm and a height of greater than or equal to about 0.45 μm to less than or equal to about 30 μm, wherein
BDD of the fourth portion is exposed at the distal end of the longitudinal shank, is pristine BDD, and defines a sensing region,
BDD of the third portion is exposed at an outermost surface of the contact pad and defines an electrode lead region, and
a plane of the fourth portion is perpendicular to a plane of the third portion.