US 12,237,205 B2
Substrate support assembly for substrate treatment apparatus
Taek Youb Lee, Chungcheongnam-do (KR)
Assigned to Deviceeng Co. Ltd, Chungcheongnam-do (KR)
Filed by DEVICEENG CO. LTD, Chungcheongnam-do (KR)
Filed on Dec. 27, 2021, as Appl. No. 17/562,593.
Claims priority of application No. 10-2021-0111355 (KR), filed on Aug. 24, 2021.
Prior Publication US 2023/0062042 A1, Mar. 2, 2023
Int. Cl. H01L 21/68 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/68764 (2013.01) [H01L 21/6875 (2013.01); H01L 21/68792 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A substrate support assembly for a substrate treatment apparatus, comprising:
a chuck base disposed opposite to a substrate when the substrate is installed, rotatable around a rotating shaft, and having an installation accommodation portion formed in the lower portion near the outer peripheral surface thereof in a circumferential direction thereof;
chuck pins disposed on top of the chuck base and movable along directions away from and approaching the substrate;
a mechanism unit disposed in the installation accommodation portion and connected to each of the chuck pins to move each of the chuck pins; and
a driving unit for transmitting power to the mechanism unit,
wherein the mechanism unit comprises:
a first operating piece returnably movable in a direction of the rotating shaft by means of the driving unit; and
a second operating piece having one side coming into contact with the first operating piece along a longitudinal direction thereof, allowing each of the chuck pins to be disposed on the other side thereof, and returnably moving around a hinge shaft disposed on the chuck base between one side and the other side thereof,
wherein between the first operating piece and the chuck base is disposed a first spring applying a restoring force or a first magnet applying a magnetic force in a direction of the first operating piece and the chuck base away from each other along the rotating shaft, and between the second operating piece and the chuck base is disposed a second spring applying a restoring force or a second magnet applying a magnetic force so that each of the chuck pins moves to a holding position.