US 12,237,204 B1
Ceramic susceptor and method of manufacturing same
So Young Park, Anseong si (KR); and Byung Gil Chun, Anseong si (KR)
Assigned to MiCo Ceramics Ltd., Anseong-si (KR)
Filed by MiCo Ceramics Ltd., Anseong-si (KR)
Filed on Aug. 7, 2024, as Appl. No. 18/796,450.
Int. Cl. H01L 21/687 (2006.01); B32B 15/04 (2006.01); B32B 15/20 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68757 (2013.01) [B32B 15/04 (2013.01); B32B 15/20 (2013.01); H01L 21/6833 (2013.01); B32B 2307/7376 (2023.05)] 10 Claims
OG exemplary drawing
 
6. A ceramic susceptor comprising a base body and an insulating plate,
wherein the base body comprises a lower plate and an upper plate which are each made of a metal ceramic composite, and a bonding portion there between,
wherein the bonding portion comprises:
a first active metal layer, a first aluminum layer, and a brazing filler layer sequentially laminated on the upper plate; and
a second active metal layer and a second aluminum layer sequentially laminated on the lower plate, and
wherein the lower plate and the upper plate are brazing-bonded with the brazing filler layer.