US 12,237,203 B2
System, method, and user interface for edge ring wear compensation
Tom A. Kamp, San Jose, CA (US); and Carlos Leal-Verdugo, Richmond, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Filed by Lam Research Corporation, Fremont, CA (US)
Filed on Nov. 21, 2022, as Appl. No. 17/991,193.
Application 17/991,193 is a division of application No. 16/769,681, granted, now 11,538,713, previously published as PCT/US2018/063385, filed on Nov. 30, 2018.
Claims priority of provisional application 62/594,861, filed on Dec. 5, 2017.
Prior Publication US 2023/0083737 A1, Mar. 16, 2023
Int. Cl. H01L 21/687 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68721 (2013.01) [H01L 21/67288 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A method for adjusting a height of an edge ring arranged around an outer portion of a substrate support in a substrate processing system, the method comprising:
receiving, from a user interface, at least one input indicative of one or more erosion rates of the edge ring, wherein the at least one input includes a plurality of erosion rates for respective usage periods of the substrate processing system;
determining, by a controller, at least one erosion rate of the edge ring using the plurality of erosion rates for the respective usage periods, wherein determining the at least one erosion rate includes calculating the plurality of erosion rates in the respective usage periods;
monitoring an overall usage of the edge ring and storing the overall usage of the edge ring in a memory;
calculating an amount of erosion of the edge ring based on the determined at least one erosion rate and the overall usage of the edge ring; and
adjusting the height of the edge ring based on the calculated amount of erosion to compensate for the calculated amount of erosion.