US 12,237,202 B2
Die bonding system with heated automatic collet changer
Nicholas Samuel Celia, Jr., Avon, MA (US); and Cyriac Devasia, Nashua, NH (US)
Assigned to MRSI Systems, LLC, Tewksbury, MA (US)
Appl. No. 17/421,270
Filed by MRSI Systems LLC, Tewksbury, MA (US)
PCT Filed Mar. 18, 2020, PCT No. PCT/US2020/023252
§ 371(c)(1), (2) Date Jul. 7, 2021,
PCT Pub. No. WO2020/190991, PCT Pub. Date Sep. 24, 2020.
Claims priority of provisional application 62/819,996, filed on Mar. 18, 2019.
Prior Publication US 2022/0102187 A1, Mar. 31, 2022
Int. Cl. H01L 21/687 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68721 (2013.01) [H01L 21/67132 (2013.01); H01L 21/67144 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A die heating apparatus, the die heating apparatus comprising:
a die heater configured to heat; and
a plurality of rods fixed to said die heater, said rods being configured to allow said die heater to be retained,
wherein said plurality of rods are evenly and concentrically disposed about a central axis of the die heater, and
wherein said rods are configured to supply power and ground to the die heater.