US 12,237,196 B2
Docking device with moveable frame and sealing component
Chih-Hung Huang, Hsinchu (TW); Cheng-Lung Wu, Zhunan Township (TW); Yang-Ann Chu, Hsinchu (TW); Hsuan Lee, Tainan (TW); and Jiun-Rong Pai, Jhubei (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on May 15, 2023, as Appl. No. 18/317,312.
Application 18/317,312 is a continuation of application No. 17/657,758, filed on Apr. 4, 2022, granted, now 11,651,984.
Application 17/657,758 is a continuation of application No. 17/248,073, filed on Jan. 7, 2021, granted, now 11,302,552, issued on Apr. 12, 2022.
Prior Publication US 2023/0335424 A1, Oct. 19, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67775 (2013.01) [H01L 21/67766 (2013.01); H01L 21/67772 (2013.01); H01L 21/68707 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A docking device, comprising:
a chamber;
a divider wall;
a set of tracks included in the chamber and mounted to the divider wall;
a moveable frame included in the chamber and mounted to the set of tracks,
wherein the moveable frame is configured to slide along the set of tracks; and
a sealing component, mounted to the moveable frame, configured to form a continuous air-tight seal between the moveable frame and a transport carrier in the chamber,
wherein to form the continuous air-tight seal:
a first portion of the sealing component is configured to transition inward in a horizontal direction and in parallel with the divider wall, and
a second portion of the sealing component is configured to transition inward in a vertical direction and in parallel with the divider wall.