US 12,237,195 B2
Cassette lid opening device
Theodorus G. M. Oosterlaken, Oudewater (NL); Maarten Hendrikus Maria Lamers, Vortum-Mullem (NL); Nimit Kothari, Almere (NL); and Chaggai Shmuel Ganani, Almere (NL)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V, Almere (NL)
Filed on Jul. 5, 2022, as Appl. No. 17/810,748.
Claims priority of provisional application 63/218,844, filed on Jul. 6, 2021.
Prior Publication US 2023/0012302 A1, Jan. 12, 2023
Int. Cl. H01L 21/677 (2006.01)
CPC H01L 21/67772 (2013.01) 21 Claims
OG exemplary drawing
 
1. A cassette lid opening device for a semiconductor substrate processing apparatus, wherein the cassette lid opening device comprises:
a housing having at least one wall with an associated wall opening;
a door assembly comprising at least one door plate configured for substantially closing off the associated wall opening of the at least one wall;
a transport mechanism including a carriage which is connected to the door assembly and configured to transport the door assembly parallel to the at least one wall between a first position in front of the associated wall opening and a second position laterally away from the associated wall opening so as to allow passage of wafers through the associated wall opening; and
at least one suspension arranged between the at least one door plate and the transport mechanism, wherein the at least one suspension comprises a suspension spring assembly which allows movement of the at least one door plate in a direction perpendicular to the at least one wall,
wherein the at least one suspension comprises:
a door assembly suspension comprising the suspension spring assembly, wherein the suspension spring assembly of the door assembly suspension comprises two parallel blade springs which are each connected with a first longitudinal edge to the carriage and which are each connected with a second longitudinal edge to the door assembly.