US 12,237,194 B2
Substrate transporter and substrate processing apparatus including substrate transporter
Akihiro Yazawa, Tokyo (JP); Takashi Koba, Tokyo (JP); Kenichi Kobayashi, Tokyo (JP); Kenichi Akazawa, Tokyo (JP); Fong-Jie Du, Tokyo (JP); Makoto Kashiwagi, Tokyo (JP); Asagi Matsugu, Tokyo (JP); Takahiro Nanjo, Tokyo (JP); Hideharu Aoyama, Tokyo (JP); Takashi Mitsuya, Tokyo (JP); and Tetsuji Togawa, Tokyo (JP)
Assigned to EBARA CORPORATION, Toyko (JP)
Appl. No. 17/258,916
Filed by EBARA CORPORATION, Tokyo (JP)
PCT Filed Jul. 9, 2019, PCT No. PCT/JP2019/027067
§ 371(c)(1), (2) Date Sep. 9, 2021,
PCT Pub. No. WO2020/013151, PCT Pub. Date Jan. 16, 2020.
Claims priority of application No. 2018-132231 (JP), filed on Jul. 12, 2018.
Prior Publication US 2022/0005716 A1, Jan. 6, 2022
Int. Cl. B24B 37/14 (2012.01); B24B 37/26 (2012.01); B24B 37/30 (2012.01); B65G 13/02 (2006.01); H01L 21/304 (2006.01); H01L 21/677 (2006.01); B24B 41/06 (2012.01); B24B 57/02 (2006.01); B65G 39/04 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/67706 (2013.01) [B24B 37/14 (2013.01); B24B 37/26 (2013.01); B24B 37/30 (2013.01); B65G 13/02 (2013.01); H01L 21/304 (2013.01); B24B 41/06 (2013.01); B24B 57/02 (2013.01); B65G 39/04 (2013.01); H01L 21/67034 (2013.01); H01L 21/67219 (2013.01); H01L 21/67259 (2013.01); H01L 21/6776 (2013.01)] 29 Claims
OG exemplary drawing
 
1. A substrate conveying apparatus for conveying a rectangular substrate, the substrate conveying apparatus comprising:
a plurality of conveyance rollers configured to support a lower surface of the substrate;
a plurality of roller shafts to which the plurality of conveyance rollers are mounted;
a motor configured to rotate the plurality of roller shafts; and
a pusher for lifting the substrate on the plurality of conveyance rollers such that the substrate is separated away from the plurality of conveyance rollers, wherein
the pusher includes a stage configured to pass through a clearance between the plurality of roller shafts,
the pusher is configured to be able to hand over the rectangular substrate to a top ring,
the stage of the pusher includes a plurality of support pillars, and
the plurality of support pillars includes four support pillars, one of each of the four support pillars located at one of four corners of the pusher, and each of the four support pillars includes a support surface for supporting the top ring and an inclined surface for guiding the top ring.