US 12,237,193 B2
Gas-inlet module and gas-inlet nozzle
Yi-Jun Gu, Miaoli County (TW)
Assigned to BRILLIAN NETWORK & AUTOMATION INTEGRATED SYSTEM CO., LTD., Miaoli County (TW)
Filed by Brillian Network & Automation Integrated System Co., Ltd., Miaoli County (TW)
Filed on Jul. 28, 2022, as Appl. No. 17/875,944.
Prior Publication US 2024/0038562 A1, Feb. 1, 2024
Int. Cl. H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67393 (2013.01) [H01L 21/67386 (2013.01); H01L 21/6773 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A gas-inlet module, comprising:
at least one gas-inlet nozzle including:
a first gas-inlet channel having a first end opening; and
a second gas-inlet channel having a second end opening, wherein a distance between a center point of the second end opening and a center point of the first end opening is defined as an offset distance;
wherein a value defined by an inner radius of the first end opening or an inner radius of the second end opening divided by the offset distance is within a range from 1/7 to 5/7;
wherein a quantity of the at least one gas-inlet nozzle is two, and a top portion of each of the two gas-inlet nozzles includes:
a first airtight structure having a first arc boundary, wherein the first arc boundary has a center of a first circle and a first radius; and
a second airtight structure having a second arc boundary, wherein the second arc boundary has a center of a second circle and a second radius, and wherein the first arc boundary is connected to the second arc boundary so as to jointly define an outer airtight boundary, and the center of the first circle is spaced apart from the center of the second circle by the offset distance.