US 12,237,192 B2
Mini-environment system for controlling oxygen and humidity levels within a sample transport device
Alexander Fridman, Haifa (IL); Tzachi Pressburger, Kfar HaHoresh (IL); Herman Vilenchik, Migdal Haemek (IL); and Arthur Kalman, Migdal Haemek (IL)
Assigned to KLA Corporation, Milpitas, CA (US)
Filed by KLA Corporation, Milpitas, CA (US)
Filed on Apr. 6, 2021, as Appl. No. 17/223,362.
Claims priority of provisional application 63/011,302, filed on Apr. 17, 2020.
Prior Publication US 2021/0327736 A1, Oct. 21, 2021
Int. Cl. H01L 21/673 (2006.01); G01N 1/28 (2006.01); G01N 1/00 (2006.01)
CPC H01L 21/67389 (2013.01) [G01N 1/28 (2013.01); G01N 2001/002 (2013.01)] 29 Claims
OG exemplary drawing
 
1. An apparatus comprising:
an enclosure, the enclosure including a frame, the frame defining an internal cavity within the enclosure, wherein the enclosure includes a plate forms a portion of the frame, the plate including two or more slots;
a flapper blade, the flapper blade coupled to a portion of the frame, the flapper blade configured to close at least one opening of the frame to form a sealed enclosure when the flapper blade is in a closed position;
two or more shutters, the two or more shutters coupled to a portion of the plate to cover the two or more slots, wherein a respective shutter is configured to cover a respective opening when in a closed state, wherein the respective shutter is configured to open and close to allow for extraction of a wafer from a FOUP without contamination to additional wafers of the FOUP.