| CPC H01L 21/67207 (2013.01) [B08B 1/10 (2024.01); B08B 3/04 (2013.01); B08B 7/0035 (2013.01); B08B 13/00 (2013.01); F26B 25/14 (2013.01); G06T 1/0014 (2013.01); H01L 21/67144 (2013.01); H01L 21/6838 (2013.01)] | 14 Claims |
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1. A method of cleaning one or more dirty tools in a multi-chamber processing tool, comprising:
providing one or more dirty tools comprising a nozzle head with a shaft coupled to the nozzle head, the nozzle head having one or more vacuum openings to retain a die against the nozzle head;
providing a holder in a bonding chamber of the multi-chamber processing tool, the holder comprising one or more pins to retain the one or more dirty tools;
placing the one or more dirty tools on the holder in the bonding chamber, wherein the bonding chamber further comprises a first substrate having a plurality of dies and a second substrate, and wherein the bonding chamber is used to bond one or more dies of the plurality of dies to the second substrate;
transferring the holder from the bonding chamber to a cleaning chamber of the multi-chamber processing tool via a transfer robot disposed in the multi-chamber processing tool;
cleaning the one or more dirty tools in the cleaning chamber to produce one or more cleaned tools;
inspecting the one or more cleaned tools in an inspection chamber of the multi-chamber processing tool; and
transferring the one or more cleaned tools from the inspection chamber to the bonding chamber via the transfer robot.
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