US 12,237,154 B2
Bottom and middle edge rings
Hiran Rajitha Rathnasinghe, Fremont, CA (US); Shawn E S Tokairin, Fremont, CA (US); and Jon McChesney, Fremont, CA (US)
Assigned to LAM RESEARCH CORPORATION, Fremont, CA (US)
Appl. No. 16/487,703
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Nov. 21, 2017, PCT No. PCT/US2017/062769
§ 371(c)(1), (2) Date Aug. 21, 2019,
PCT Pub. No. WO2019/103722, PCT Pub. Date May 31, 2019.
Prior Publication US 2020/0312633 A1, Oct. 1, 2020
Int. Cl. H01J 37/32 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/32642 (2013.01) [H01L 21/67069 (2013.01); H01L 21/68735 (2013.01); H01J 2237/049 (2013.01); H01J 2237/334 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A bottom ring configured to support a moveable edge ring, wherein the edge ring is configured to be raised and lowered relative to a substrate support, the bottom ring comprising:
an upper surface, wherein the upper surface includes a step upward such that the upper surface has at least two different heights, and wherein the step upward is substantially vertical;
an annular inner diameter;
an annular outer diameter;
a lower surface that includes a step downward towards the annular outer diameter of the bottom ring such that the lower surface has at least two different heights; and
a plurality of guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring, wherein the plurality of guide channels is positioned radially inward from the step downward, the plurality of guide channels is positioned nearer to the step downward than to the annular inner diameter, each of the guide channels includes a first region having a smaller diameter than a remainder of the guide channel, the first region is positioned closer to the upper surface than the lower surface of the bottom ring, and the guide channels are configured to receive respective lift pins for raising and lowering the edge ring.