| CPC H01J 37/28 (2013.01) [H01J 37/1477 (2013.01); H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/24535 (2013.01); H01J 2237/2802 (2013.01)] | 21 Claims |

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1. A method of forming an image based on an electron event signal, the method comprising:
(a) providing an information threshold for a sample;
(b) collecting from an electron detector a number of events equal to the information threshold or determining that an event rate equal to the information threshold is achieved, wherein the electron detector is configured to collect an electron signal or an electron induced signal from the sample; and
(c) forming an image according to the electron signal or the electron induced signal.
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