US 12,237,146 B2
Determining a depth of a hidden structural element background
Lior Akerman, Rehovot (IL); and Vadim Kuchik, Kiriat Ekron (IL)
Assigned to Applied Materials Israel Ltd., Rehovot (IL)
Filed by Applied Materials Israel Ltd., Rehovot (IL)
Filed on Mar. 30, 2022, as Appl. No. 17/709,272.
Prior Publication US 2023/0317407 A1, Oct. 5, 2023
Int. Cl. H01J 37/27 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/244 (2013.01) [H01J 37/222 (2013.01); H01J 37/28 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for determining a depth of a hidden structural element formed on a sample, the method comprising:
scanning a region of interest of the sample with an illuminating electron beam causing emission of electrons from the sample, wherein the region of interest comprises a first sample portion in which the hidden structural element is located and second sample portion surrounding the hidden structural element;
detecting electrons generated during the scanning with an electron detector to generate: (a) hidden structural element detection signals that are indicative of electrons emitted from the hidden structural element in the first sample portion, and (b) surroundings detection signals that are indicative of electrons emitted from the second sample portion;
determining contrast information based on a relationship between the hidden structural detection signals and the surroundings detection signals; and
determining the depth of the hidden structural element based, at least in part, on the contrast information.