US 12,237,144 B2
Apparatus using multiple beams of charged particles
Xuerang Hu, San Jose, CA (US); Weiming Ren, San Jose, CA (US); Xuedong Liu, San Jose, CA (US); and Zhong-wei Chen, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Sep. 28, 2023, as Appl. No. 18/477,213.
Application 18/477,213 is a continuation of application No. 17/656,731, filed on Mar. 28, 2022, granted, now 11,804,356.
Application 17/656,731 is a continuation of application No. 16/608,741, granted, now 11,289,304, issued on Mar. 29, 2022, previously published as PCT/EP2018/058631, filed on Apr. 4, 2018.
Claims priority of provisional application 62/492,043, filed on Apr. 28, 2017.
Prior Publication US 2024/0071711 A1, Feb. 29, 2024
Int. Cl. H01J 37/147 (2006.01); H01J 37/12 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/1477 (2013.01) [H01J 37/12 (2013.01); H01J 37/26 (2013.01); H01J 2237/0213 (2013.01); H01J 2237/0262 (2013.01); H01J 2237/038 (2013.01); H01J 2237/0435 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system comprising:
a charged particle optical device comprising:
a first electrically conductive layer;
a second electrically conductive layer;
a plurality of optics elements between the first electrically conductive layer and the second electrically conductive layer, wherein the plurality of optics elements are configured to influence a plurality of beams of charged particles;
a third electrically conductive layer between the first electrically conductive layer and the second electrically conductive layer;
an electrically insulating layer physically connected to the optics elements, wherein the electrically insulating layer is configured to electrically insulate the optics elements from the first electrically conductive layer, and the second electrically conductive layer; and
a fourth electrically conductive layer in contact with and upstream to the first electrically conductive layer.