US 12,237,142 B2
Methods for determining the virtual source location of a liquid metal ion source
Sean M. Kellogg, Hillsboro, OR (US); Mostafa Maazouz, Hillsboro, OR (US); and James B. McGinn, Hillsboro, OR (US)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Jun. 16, 2022, as Appl. No. 17/807,362.
Prior Publication US 2023/0411109 A1, Dec. 21, 2023
Int. Cl. H01J 37/09 (2006.01); H01J 37/22 (2006.01); H01J 37/24 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/09 (2013.01) [H01J 37/226 (2013.01); H01J 37/244 (2013.01); H01J 2237/0458 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/2445 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A charged particle beam (CPB) alignment apparatus, comprising:
an alignment aperture plate defining an alignment aperture;
a secondary emission element situated to receive a portion of a CPB transmitted by the alignment aperture and operable to produce secondary emission in response;
a scintillator element situated to receive at least a portion of the secondary emission and produce scintillation light in response; and
a photodetector situated to receive the scintillation light produced at the scintillator element,
wherein the alignment aperture is moveable so as to receive the charged particle beam so that the scintillation light is detected by the photodetector, whereby an axis of the charged particle beam may be located.