US 12,237,141 B2
Laminate, electron source and electronic device containing laminate, and production method and cleaning method for laminate
Katsumi Nagaoka, Tsukuba (JP); Takashi Aizawa, Tsukuba (JP); and Shun-Ichiro Ohmi, Tokyo (JP)
Assigned to National Institute for Materials Science, Ibaraki (JP)
Appl. No. 18/694,081
Filed by NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Ibaraki (JP)
PCT Filed Sep. 20, 2022, PCT No. PCT/JP2022/034976
§ 371(c)(1), (2) Date Mar. 21, 2024,
PCT Pub. No. WO2023/048139, PCT Pub. Date Mar. 30, 2023.
Claims priority of application No. 2021-154427 (JP), filed on Sep. 22, 2021.
Prior Publication US 2024/0395494 A1, Nov. 28, 2024
Int. Cl. H01J 37/075 (2006.01); H01J 9/04 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/075 (2013.01) [H01J 9/04 (2013.01); H01J 37/26 (2013.01); H01J 2237/06308 (2013.01)] 12 Claims
 
1. A laminate comprising a lanthanoid boride film formed on a substrate, wherein a surface of the lanthanoid boride film is coated with a thin film, and
wherein the thin film is a monoatomic layer hexagonal boron nitride thin film.