| CPC G06T 7/001 (2013.01) [G01J 1/42 (2013.01); G01J 1/44 (2013.01); G01N 21/958 (2013.01); G02B 27/0172 (2013.01); G06T 7/80 (2017.01); G06T 7/90 (2017.01); H04N 23/56 (2023.01); H04N 23/74 (2023.01); H04N 23/90 (2023.01); G01J 2001/4247 (2013.01); G01N 2021/9583 (2013.01); G02B 2027/0112 (2013.01); G02B 2027/0118 (2013.01); G02B 2027/0138 (2013.01); G02B 2027/014 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/30108 (2013.01)] | 20 Claims |
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1. An optical device metrology system, comprising:
a stage configured to move a tray along a stage path;
a first subsystem comprising:
a first body having a first opening and a second opening to allow the stage to move through the first opening and the second opening,
a first light engine positioned within the first body and mounted above the stage path, the first light engine configured to direct first light beams toward the stage path,
a first detector positioned within the first body and mounted above the stage path to receive first projected light beams projected upwardly from the stage path, and
a second detector positioned within the first body and mounted below the stage path to receive second projected light beams projected downwardly from the stage path; and
a second subsystem comprising:
a second body having a first opening and a second opening to allow the stage to move through the first opening and the second opening of the second body,
a second light engine positioned within the second body and mounted above the stage path, the second light engine configured to direct second light beams toward the stage path, and
a face illumination detector configured to receive third projected light beams projected upwardly from the stage path; and
a controller in communication with the stage, the first subsystem, and the second subsystem, the controller comprising instructions that, when executed, cause:
an alignment operation for the first light engine, wherein;
a laser source directs a first laser light through a pinhole and toward the optical device;
an alignment detector determines a light intensity of a first reflected laser light;
a tilt and a pitch of the laser source is adjusted to increase the light intensity to an increased light intensity;
the stage to position an optical device within the first subsystem to align the optical device with the first detector and the second detector of the first subsystem;
the first light engine to direct first light beams toward the optical device;
the first detector to capture a plurality of first images of first projected light beams that project from the optical device;
the second detector to capture a plurality of second images of second projected light beams that project from the optical device;
processing of one or more of the plurality of first images or the plurality of second images to determine a plurality of first metrics of the optical device;
the stage to position the optical device within the second subsystem to align the optical device with the face illumination detector of the second subsystem;
the second light engine to direct second light beams toward the optical device;
the face illumination detector to capture a plurality of third images of third projected light beams that project from the optical device;
processing of the plurality of third images to determine one or more second metrics of the optical device, the one or more second metrics including a display leakage metric.
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