| CPC G06T 7/001 (2013.01) [G06T 3/10 (2024.01); G06T 7/50 (2017.01); G06T 11/00 (2013.01); G06T 2207/30148 (2013.01)] | 7 Claims |
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1. A substrate treating apparatus for treating a substrate, the substrate treating apparatus comprising:
a bowl provided to surround the substrate;
a nozzle discharging discharge liquid to the substrate drawing parabolas;
an imaging unit configured to photograph loci of the discharge liquid discharged from the nozzle; and
an inspection unit configured to:
convert a coordinate system into a polar coordinate system;
calculate an impact point of the discharge liquid discharged from the nozzle and determine whether the impact point of the discharge liquid discharged from the nozzle are normal by comparing whether the impact point of the discharge liquid discharged from the nozzle corresponds to threshold values ranges of the nozzle by using data values obtained in the converted polar coordinate system, the threshold value ranges of the nozzles being determined based on flow rate values in the nozzle and location of the loci according to the flow rate values; and
generate a binarized image of the loci,
wherein the nozzle protrudes from a basin of the bowl, such that, in a plan view, the nozzle is located outside of the substrate, and
wherein, in the comparing, the inspection unit compares an angle of the impact point, which is derived from an actually captured image, and an angle of the impact point set depending on the flow rate values in the nozzle.
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