| CPC G06K 7/1434 (2013.01) [G06K 7/016 (2013.01); G06K 7/10574 (2013.01)] | 14 Claims |
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1. A laser processing system comprising:
a first light irradiator including:
a first light emitter configured to emit first laser light; and
a first light scanner configured to scan a first region of a workpiece with the first laser light emitted from the first light emitter;
a second light irradiator including:
a second light emitter configured to emit second laser light; and
a second light scanner configured to scan a second region different from the first region of the workpiece with the second laser light emitted from the second light emitter,
and
wherein:
the first light irradiator emits the first laser light to the first region of the workpiece in a first irradiation direction,
the second light irradiator emits the second laser light to the second region of the workpiece in a second irradiation direction opposite to the first irradiation direction,
the first light irradiator includes a first light scanner including:
a first light deflector; and
a first optical element attached to the first light deflector,
the second light irradiator includes a second light scanner including:
a second light deflector; and
a second optical element attached to the second light deflector, and
the laser processing system satisfy a following condition in which:
L>(WD1+d/2)×tan(θ½)+CA½+(WD2+d/2)×tan(θ2/2)+CA2/2, (1)
where L (mm) is a distance between a center of the optical axis of the first light irradiator and a center of the optical axis of the second light irradiator,
θ1 (°) is a deflection angle of the first light deflector,
θ2 (°) is a deflection angle of the second light deflector,
WD1 (mm) is a working distance of the first imaging optical elemental element,
WD2 (mm) is a working distance of the second imaging optical element,
CA1 (mm) is a diameter of an aperture of the first imaging optical element,
CA2 (mm) is a diameter of an aperture of the second imaging optical element, and
d (mm) is a maximum diameter of the workpiece.
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