US 12,235,663 B2
Apparatus for controlling flow rate and method of controlling flow rate
Myung Hwan Eom, Gyeonggi-do (KR); Sang Hyun Son, Busan (KR); and Jae Hong Kim, Chungcheongnam-do (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on May 11, 2022, as Appl. No. 17/742,281.
Claims priority of application No. 10-2021-0130553 (KR), filed on Oct. 1, 2021.
Prior Publication US 2023/0106044 A1, Apr. 6, 2023
Int. Cl. G05D 7/06 (2006.01); G01F 1/667 (2022.01); G05B 19/416 (2006.01)
CPC G05D 7/0623 (2013.01) [G01F 1/667 (2013.01); G05B 19/416 (2013.01); G05D 7/0635 (2013.01); G05B 2219/37371 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus for controlling a flow rate comprising:
a flow rate measuring unit for measuring a flow rate of chemical solution in a chemical solution supply line;
a flow rate control unit for comparing a preset target flow rate profile and an applied flow rate profile, and controlling the flow rate of the chemical solution so that the applied flow rate profile matches the target flow rate profile; and
a processor for switching the flow rate control unit to a first mode in response to a signal for the flow rate of the chemical solution measured by the flow rate measuring unit being less than a preset level,
wherein, in the first mode, the applied flow rate profile includes a profile of a flow rate estimation model simulated using a flow rate of chemical solution measured by the flow rate measuring unit.