US 12,235,592 B2
Object holder, electrostatic sheet and method for making an electrostatic sheet
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Rosmalen (NL); Koos Van Berkel, Waalre (NL); Marcus Adrianus Van De Kerkhof, Helmond (NL); Roger Franciscus Mattheus Maria Hamelinck, Breda (NL); Shahab Shervin, Norwalk, CT (US); Marinus Augustinus Christiaan Verschuren, Helmond (NL); Johannes Bernardus Charles Engelen, 'S-Hertogenbosch (NL); Matthias Kruizinga, Herten (NL); Tammo Uitterdijk, Wilton, CT (US); Oleksiy Sergiyovich Galaktionov, Geldrop (NL); Kjeld Gertrudus Hendrikus Janssen, Nijmegen (NL); Johannes Adrianus Cornelis Maria Pijnenburg, Moergestel (NL); and Peter Van Delft, Geldrop (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 18/008,283
Filed by ASML NETHERLANDS B.V., Veldhoven (NL); and ASML HOLDING N.V., Veldhoven (NL)
PCT Filed Jun. 9, 2021, PCT No. PCT/EP2021/065418
§ 371(c)(1), (2) Date Dec. 5, 2022,
PCT Pub. No. WO2021/250074, PCT Pub. Date Dec. 16, 2021.
Claims priority of application No. 20179524 (EP), filed on Jun. 11, 2020.
Prior Publication US 2023/0236518 A1, Jul. 27, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70825 (2013.01) [G03F 7/70708 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An object holder configured to support an object, the object holder comprising:
a core body comprising a plurality of burls having distal ends in a support plane for supporting the object;
an electrostatic sheet between the burls, the electrostatic sheet comprising an electrode sandwiched between dielectric layers; and
a circumferential barrier for reducing outflow of gas escaping from a space between the electrostatic sheet and the core body.