	US 12,235,591 B2
	Device and method for positioning a shadow mask
Johannes Felix Holger Schmitt, Griesheim (DE); Jan Somboonvong, Erlangen (DE); Stefan Bleil, Bad Homburg (DE); and Dominik Hoegenauer, Frankfurt am Main (DE)
Assigned to ABB Schweiz AG, Baden (CH)
Filed by ABB Schweiz AG, Baden (CH)
Filed on Mar. 24, 2023, as Appl. No. 18/189,564.
Claims priority of application No. 22165631 (EP), filed on Mar. 30, 2022.
Prior Publication US 2023/0314961 A1, Oct. 5, 2023
Int. Cl. G03F 7/00 (2006.01)

CPC G03F 7/70775 (2013.01)

20 Claims

19. A method for positioning a shadow mask using a device or system for positioning a shadow mask, wherein the device comprises a mask application tool comprising an inner body comprising, at an end surface of the inner body, one or more magnets, and a hollow outer body for receiving the inner body, the outer body comprising, at an end surface of the outer body, a mask socket and one or more guide elements for positioning the mask application tool on a substrate tray, and wherein the method comprises:

placing the shadow mask into the mask socket;

inserting, prior to or after placing the shadow mask into the mask socket, the inner body into the outer body to hold the shadow mask in the mask socket utilizing the one or more magnets;

positioning the mask application tool on a substrate tray using the one or more guide elements to position the shadow mask on a substrate arranged on the substrate tray, while holding the shadow mask in the mask socket utilizing the one or more magnets; and

after positioning the shadow mask on the substrate, partially or completely drawing the inner body from the outer body to release the shadow mask from the mask socket and lifting the outer body from the substrate tray after releasing the shadow mask.