US 12,235,590 B2
Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor
Sol-Lee Hwang, Hwaseong-si (KR); Dong-Won Jung, Hwaseong-si (KR); Hee-Chul Lim, Hwaseong-si (KR); Hyun-Kyoo Shon, Hwaseong-si (KR); and Min-Ho Lee, Hwaseong-si (KR)
Assigned to AUROS TECHNOLOGY, INC., Hwaseong-si (KR)
Filed by AUROS TECHNOLOGY, INC., Hwaseong-si (KR)
Filed on Feb. 6, 2024, as Appl. No. 18/433,479.
Application 18/433,479 is a continuation of application No. 18/142,886, filed on May 3, 2023, granted, now 11,960,214.
Claims priority of application No. 10-2022-0151955 (KR), filed on Nov. 14, 2022.
Prior Publication US 2024/0176251 A1, May 30, 2024
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70641 (2013.01) [G03F 7/70625 (2013.01); G03F 7/70633 (2013.01)] 8 Claims
 
1. A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer, the data, comprising:
information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device,
wherein the overlay measurement device comprises
a light source,
an aperture that changes a beam from the light source to be suitable for photographing the first overlay mark or the second overlay mark,
a detector that acquires an image of the first overlay mark and an image of the second overlay mark,
a transceiver, and
a processor electrically connected to the transceiver, and
wherein the processor is configured to
obtain the data transmitted from the user terminal through the transceiver,
analyze the recipe included in the data,
when the analysis of the recipe is completed, perform optimization process for measurement options of the wafer based on the recipe,
calculate statistical values of a plurality of parameters in relation to each aperture of one or more apertures by measuring the one or more apertures once,
apply a weight respectively to the calculated statistical values, and
perform an aperture optimization process of selecting an aperture from the one or more apertures where a total of the statistical values to which the weight is applied respectively is a minimum value.