US 12,235,587 B2
Method and system for determining initial contact control values for shaping partial fields and method and system for shaping partial fields
Daniel Ironside, Austin, TX (US); and Logan L. Simpson, Coupland, TX (US)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Mar. 28, 2023, as Appl. No. 18/127,074.
Prior Publication US 2024/0329542 A1, Oct. 3, 2024
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/70516 (2013.01) 18 Claims
OG exemplary drawing
 
1. A method of imprinting a partial field comprising:
determining a set of initial contact control values using an initial contact point model for predicting a potential initial contact point based on:
a superset of calibration data;
a desired initial contact point; and
a partial field shape description;
wherein the initial contact point model is one of:
a linear regression for predicting the potential initial contact point based on potential initial contact control values;
a state-vector regression for predicting the potential initial contact point based on potential initial contact control values; and
a neural network regression for predicting the potential initial contact point based on potential initial contact control values; and
imprinting the partial field with the set of initial contact control values.