| CPC G03F 7/70516 (2013.01) | 18 Claims |
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1. A method of imprinting a partial field comprising:
determining a set of initial contact control values using an initial contact point model for predicting a potential initial contact point based on:
a superset of calibration data;
a desired initial contact point; and
a partial field shape description;
wherein the initial contact point model is one of:
a linear regression for predicting the potential initial contact point based on potential initial contact control values;
a state-vector regression for predicting the potential initial contact point based on potential initial contact control values; and
a neural network regression for predicting the potential initial contact point based on potential initial contact control values; and
imprinting the partial field with the set of initial contact control values.
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