US 12,235,583 B2
Micropatterning method, micropatterning apparatus and micropatterning chip for silicone-based elastomer
Seung Hwan Ko, Seoul (KR); Jae Ho Shin, Incheon (KR); Phil Lip Won, Seoul (KR); and Seong Min Jeong, Seoul (KR)
Assigned to SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul (KR)
Appl. No. 17/762,227
Filed by SEOUL NATIONAL UNIVERSITY R&DB FOUNDATION, Seoul (KR)
PCT Filed Apr. 10, 2020, PCT No. PCT/KR2020/004868
§ 371(c)(1), (2) Date Mar. 21, 2022,
PCT Pub. No. WO2020/218763, PCT Pub. Date Oct. 29, 2020.
Claims priority of application No. 10-2019-0049369 (KR), filed on Apr. 26, 2019; and application No. 10-2020-0037522 (KR), filed on Mar. 27, 2020.
Prior Publication US 2022/0350250 A1, Nov. 3, 2022
Int. Cl. G03F 7/20 (2006.01); B29C 59/16 (2006.01); B29K 83/00 (2006.01); B81B 1/00 (2006.01); B81C 1/00 (2006.01)
CPC G03F 7/2053 (2013.01) [B29C 59/16 (2013.01); B81B 1/002 (2013.01); B81C 1/00119 (2013.01); B29K 2083/00 (2013.01); B81B 2201/05 (2013.01); B81C 2201/0143 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A method for micropatterning on silicone-based elastomer, comprising:
preparing a silicone-based elastomer;
forming an initiator only at a first portion of the silicone-based elastomer pre-planned for the micropatterning;
emitting a laser beam from a micropatterning apparatus which emits the laser beam to the initiator to induce first pyrolysis in the first portion, wherein second pyrolysis occurs outside of the first portion by conduction of heat generated by the first pyrolysis to form a second portion in which light can be absorbed; and
emitting the laser beam while moving the laser beam to the second portion to form a micropattern,
wherein pyrolysis products are SiC, SiOC, SiO2, or amorphous silica,
wherein the initiator has a lower light transmittance than the silicone-based elastomer and the pyrolysis products are generated locally in the proximity of the initiator.