| CPC G03F 7/162 (2013.01) [B05B 1/02 (2013.01); G03F 7/168 (2013.01)] | 15 Claims |
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1. A method for treating a substrate on a support unit in a treating space defined by a treatment vessel using a wetting unit spraying a wetting medium, comprising:
performing a first step of forming a liquid film by supplying a treatment liquid to the substrate and rotating the substrate at a first speed;
spraying the wetting medium in a form of mist to the substrate to facilitate spreading of the treatment liquid at an edge region of the substrate from an outside of a substrate perimeter when viewed in a plan view,
wherein a time to start spraying the wetting medium is later than a time to start supplying the treatment liquid, and
wherein the wetting unit is installed on an inclined portion of the treatment vessel to spray the wetting medium toward the edge region of the substrate supported on the support unit; and
sensing whether the treatment liquid reaches the edge region of the substrate,
wherein the spraying of the wetting medium begins in response to a sensing result that the treatment liquid reaches the edge region of the substrate.
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