| CPC G03F 7/0002 (2013.01) [B29C 59/002 (2013.01); H01L 21/027 (2013.01)] | 19 Claims |
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1. A method of forming an array of patterns on a substrate, the method comprising:
providing a substrate including a first major surface;
providing a tiling region on the first major surface of the substrate, wherein the tiling region comprises an array of sub-regions;
for each sub-region, providing a protective tile to cover the sub-regions, comprising depositing a layer of protectant resin within the sub-region, and solidifying the protectant resin to form an array of the protective tiles corresponding to the array of sub-regions; and
sequentially repeating steps (i) and (ii) for each sub-region of a plurality of the subregions to form an array of patterns on the plurality of sub-regions of the substrate:
(i) removing the protective tile from a selected one of the plurality of sub-regions to expose the first major surface underneath; and
(ii) forming a pattern on the exposed first major surface within the selected one of the sub-regions;
wherein the step (ii) further comprises:
(a) providing a replication medium on a relief structure of a patterned template and contacting the replication medium on the relief structure of the patterned template with the selected one of the sub-regions of the substrate; or
(b) providing a replication medium on the selected one of the sub-regions of the substrate; and contacting the replication medium on the selected one of the sub-regions of the substrate with the relief structure of the patterned template; and
removing the patterned template from the selected one of the sub-regions of the substrate.
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