US 12,235,563 B2
Tunable optical filter device
Bin Guo, Shenzhen (CN)
Assigned to SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD., Shenzhen (CN)
Appl. No. 17/779,669
Filed by SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD, Shenzhen (CN)
PCT Filed Sep. 25, 2019, PCT No. PCT/CN2019/107890
§ 371(c)(1), (2) Date May 25, 2022,
PCT Pub. No. WO2021/056273, PCT Pub. Date Apr. 1, 2021.
Prior Publication US 2023/0341743 A1, Oct. 26, 2023
Int. Cl. G02F 1/21 (2006.01)
CPC G02F 1/213 (2021.01) [G02F 2203/055 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A tunable optical filter device, wherein the device comprises a first substrate having a first reflective structure and a thin film having a second reflective structure, the thin film is formed on a second substrate, and the second substrate is disposed on a surface of the thin film opposite to the second reflective structure, and part of the second substrate positional corresponding to the second reflective structure is partly removed, surfaces of the first substrate and the thin film on which the reflective structure are located are bonded to each other at the periphery through a bonding compound to form a cavity between the reflective structures, and the surface of the thin film at the cavity side are provided with a piezoelectric thin film structure.