US 12,235,439 B2
MEMS mirror system with slow light beam deflection using fast resonant oscillations about at least two resonant axes
Boris Kirillov, Judendorf-Straßenge (AT); and Maksym Sladkov, Graz (AT)
Assigned to Infineon Technologies AG, Neubiberg (DE)
Filed by Infineon Technologies AG, Neubiberg (DE)
Filed on Aug. 26, 2021, as Appl. No. 17/412,708.
Prior Publication US 2023/0067823 A1, Mar. 2, 2023
Int. Cl. G02B 26/08 (2006.01); B81B 7/00 (2006.01); G01S 7/481 (2006.01); G01S 17/34 (2020.01)
CPC G02B 26/0833 (2013.01) [B81B 7/008 (2013.01); G01S 7/4817 (2013.01); B81B 2201/047 (2013.01); G01S 17/34 (2020.01)] 31 Claims
OG exemplary drawing
 
1. A light beam deflection system configured to transmit a light beam at an output deflection angle that changes over time, the light beam deflection system comprising:
a first resonant structure configured to oscillate about a first rotation axis at a first resonant frequency;
a second resonant structure configured to oscillate about a second rotation axis at a second resonant frequency;
wherein the first rotation axis is parallel to the second rotation axis,
wherein the first resonant frequency and the second resonant frequency are different and define a predetermined frequency difference; and
a driver circuit configured to generate a first driving signal to drive the first resonant structure about the first rotation axis at the first resonant frequency while further generating a second driving signal to drive the second resonant structure about the second rotation axis at the second resonant frequency such that the output deflection angle of the light beam oscillates according to a beat pattern of a beat wave whose extrema amplitudes are modulated and defined by a periodic envelope.