US 12,235,433 B2
Solid immersion lens unit and semiconductor inspection device
Tomonori Nakamura, Hamamatsu (JP); Ikuo Arata, Hamamatsu (JP); and Xiangguang Mao, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 17/634,036
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jul. 16, 2020, PCT No. PCT/JP2020/027686
§ 371(c)(1), (2) Date Feb. 9, 2022,
PCT Pub. No. WO2021/079574, PCT Pub. Date Apr. 29, 2021.
Claims priority of application No. 2019-193496 (JP), filed on Oct. 24, 2019.
Prior Publication US 2022/0326501 A1, Oct. 13, 2022
Int. Cl. G02B 21/33 (2006.01); G02B 7/02 (2021.01)
CPC G02B 21/33 (2013.01) [G02B 7/02 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A solid immersion lens unit comprising:
a solid immersion lens; and
a holder for swingably holding the solid immersion lens,
wherein the solid immersion lens includes a first lens portion formed of a first material, and a second lens portion formed of a second material having a refractive index smaller than a refractive index of the first material and coupled to the first lens portion,
the first lens portion includes a contact surface for contacting with an observation object and a convex first spherical surface,
the second lens portion includes a concave second spherical surface facing the first spherical surface and a convex third spherical surface to be disposed to face an objective lens,
the holder has a contact portion configured to be contactable with the third spherical surface, and
the contact surface protrudes to an opposite side from the objective lens with respect to the second lens portion in a direction of an optical axis of the objective lens such that the contact surface is positioned beyond the second lens portion.