| CPC G02B 21/008 (2013.01) [G02B 21/367 (2013.01); G06N 3/084 (2013.01); H01J 37/222 (2013.01)] | 19 Claims |

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1. A method for capturing partial regions of a sample by a microscope the method comprising:
determining the partial regions of the sample which are to be captured by the microscope, the partial regions determined by a machine learning system that is trained to determine the partial regions of the sample, wherein the machine learning system is trained by supervised learning, unsupervised learning, and/or reinforcement learning to determine the partial regions of the sample which are to be captured by the microscope;
determining, by the machine learning system, a scan pattern to be used to capture the partial regions of the sample;
determining, by the machine learning system, an order in which the partial regions are to be captured; and
capturing the partial regions of the sample by the microscope based on the scan pattern in the order determined by the machine learning system.
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