US 12,235,334 B2
Sensor including at least one inclined surface
Hiromichi Umehara, Tokyo (JP); Keita Kawamori, Tokyo (JP); Kenzo Makino, Tokyo (JP); and Masachika Hashino, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Nov. 30, 2023, as Appl. No. 18/524,904.
Application 18/524,904 is a continuation of application No. 17/945,397, filed on Sep. 15, 2022, granted, now 11,867,779.
Claims priority of provisional application 63/246,437, filed on Sep. 21, 2021.
Claims priority of application No. 2022-134769 (JP), filed on Aug. 26, 2022.
Prior Publication US 2024/0094313 A1, Mar. 21, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/093 (2013.01) [G01R 33/0047 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A sensor configured to detect a predetermined physical quantity, comprising:
a substrate including a top surface;
a support member disposed on the substrate; and
a sensor element configured to change in a physical property depending on the predetermined physical quantity, wherein
the support member includes a first layer and a second layer disposed on the first layer, and also includes at least one inclined surface formed across the first layer and the second layer, and
the sensor element is supported by the support member.