US 12,235,333 B2
Magnetic sensor including magnetic detection element including bottom surface facing inclined surface
Hidekazu Kojima, Tokyo (JP); and Hiromichi Umehara, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Nov. 30, 2023, as Appl. No. 18/524,172.
Application 18/524,172 is a continuation of application No. 17/947,735, filed on Sep. 19, 2022, granted, now 11,874,346.
Claims priority of provisional application 63/246,428, filed on Sep. 21, 2021.
Claims priority of application No. 2022-139170 (JP), filed on Sep. 1, 2022.
Prior Publication US 2024/0094312 A1, Mar. 21, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/093 (2013.01) [G01R 33/0005 (2013.01); G01R 33/098 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A magnetic sensor comprising:
a substrate including a reference plane;
a support member disposed on the substrate, the support member including an inclined surface inclined with respect to the reference plane; and
a magnetic detection element structure including a bottom surface, at least a part of which faces the inclined surface, a top surface on a side opposite to the bottom surface, and a first surface connecting the bottom surface and the top surface and including two steps.