US 12,235,302 B2
Methods of detecting connection issues between a wire bonding tool and an ultrasonic transducer of a wire bonding machine
Dominick Albert DeAngelis, Villanova, PA (US); and Gary Walter Schulze, Bethlehem, PA (US)
Assigned to Kulicke and Soffa Industries, Inc., Fort Washington, PA (US)
Filed by Kulicke and Soffa Industries, Inc., Fort Washington, PA (US)
Filed on Dec. 7, 2021, as Appl. No. 17/544,677.
Claims priority of provisional application 63/126,328, filed on Dec. 16, 2020.
Prior Publication US 2022/0187353 A1, Jun. 16, 2022
Int. Cl. G01R 27/16 (2006.01); H01L 21/66 (2006.01); H01L 23/00 (2006.01)
CPC G01R 27/16 (2013.01) [H01L 22/14 (2013.01); H01L 24/78 (2013.01); H01L 2224/85205 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A method of detecting potential issues in connection with engagement between a wire bonding tool and an ultrasonic transducer of a wire bonding machine, the method comprising the steps of:
(a) providing electrical power to an ultrasonic transducer at each of a plurality of levels of electrical power;
(b) detecting an electrical characteristic of the ultrasonic transducer at each of the plurality of levels of electrical power; and
(c) checking the clamping between the wire bonding tool and the ultrasonic transducer to detect a reduced gripping force on the wire bonding tool by determining if the electrical characteristic of the ultrasonic transducer at each of the plurality of levels of electrical power is acceptable.