US 12,235,236 B2
Sensors with capacitive transduction via metamaterials for gas detection
Anthony Childress, Boston, MA (US); and Ahmed Busnaina, Needham, MA (US)
Assigned to Northeastern University, Boston, MA (US)
Filed by Northeastern University, Boston, MA (US)
Filed on May 31, 2022, as Appl. No. 17/829,221.
Claims priority of provisional application 63/194,358, filed on May 28, 2021.
Prior Publication US 2022/0381730 A1, Dec. 1, 2022
Int. Cl. G01N 27/02 (2006.01); G01N 27/416 (2006.01); G01N 33/00 (2006.01); G01N 33/24 (2006.01)
CPC G01N 27/4162 (2013.01) [G01N 33/0021 (2013.01); G01N 33/24 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A sensor device for gas detection; the device comprising:
a housing configured with a flow path for a sample gas through the housing;
a light source disposed within the housing to direct light across the flow path, the light source emitting light comprising an emission wavelength band overlapping with an absorbance spectrum or portion thereof of a first analyte selected for detection;
a sensing element disposed within the housing to receive light emitted by the light source and crossing the flow path or a portion thereof, the sensing element comprising a nanostructure array of conductive nanoelements attached to a substrate and encapsulated in a dielectric material, wherein the nanostructure array and the dielectric material are tuned to provide plasmonic absorption by the conductive nanoelements over an absorbance wavelength band that overlaps with the absorbance spectrum or a portion thereof of the first analyte, such that a local field established by plasmonic modes of the nanostructure array affects a capacitance or inductance of the sensor device.