US 12,235,222 B2
Defect inspection system using 3D measuring machine
Young Han Lim, Seoul (KR)
Filed by Young Han Lim, Seoul (KR)
Filed on Feb. 28, 2023, as Appl. No. 18/115,425.
Claims priority of application No. 10-2022-0056356 (KR), filed on May 9, 2022.
Prior Publication US 2023/0358687 A1, Nov. 9, 2023
Int. Cl. G01N 21/88 (2006.01); G06T 7/00 (2017.01)
CPC G01N 21/8806 (2013.01) [G01N 21/8851 (2013.01); G06T 7/0004 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A defect inspection system using a three-dimensional (3D) measuring machine, comprising:
a conveying part disposed between a loading part and an unloading part and holding and transferring a device;
a 2D measuring machine facing the conveying part and generating a 2D image of the device;
a 3D measuring machine facing the conveying part in a row with the 2D measuring machine and generating a 3D image of the device; and
a processor aligning and merging the 3D image and the 2D image to generate a device image and determining a defect of the device on the basis of the device image.