US 12,235,180 B2
Phase alignment system and method of oscillating mirror
Hongxiang Yu, Beijing (CN); Kangheng Wang, Beijing (CN); and Yijie Yang, Beijing (CN)
Assigned to BEIJING QIANHENGDE TECHNOLOGY CO., LTD, Beijing (CN); and BEIJING LIQIAN HENGXIN TECHNOLOGY CO., LTD, Beijing (CN)
Appl. No. 17/436,681
Filed by BEIJING QIANHENGDE TECHNOLOGY CO., LTD, Beijing (CN); and BEIJING LIQIAN HENGXIN TECHNOLOGY CO., LTD, Beijing (CN)
PCT Filed Mar. 26, 2020, PCT No. PCT/CN2020/081421
§ 371(c)(1), (2) Date Sep. 7, 2021,
PCT Pub. No. WO2020/200039, PCT Pub. Date Oct. 8, 2020.
Claims priority of application No. 201910248730.6 (CN), filed on Mar. 29, 2019.
Prior Publication US 2022/0196517 A1, Jun. 23, 2022
Int. Cl. G01M 11/02 (2006.01); G01M 11/00 (2006.01)
CPC G01M 11/0207 (2013.01) [G01M 11/005 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A phase alignment system of an oscillating mirror, comprising:
a laser light source, an oscillating mirror and a scan controller,
wherein the laser light source emits a laser beam located in a normal plane drawn from a deflection axis of the oscillating mirror, wherein the laser beam is illuminated on the center position of the oscillating mirror at a fixed incident angle, and illuminated on a projection plane after being reflected, wherein the projection plane is parallel to a plane of the oscillating mirror in static state, and wherein the scan controller is electrically connected to the oscillating mirror and the laser light source;
during scanning, the scan controller sends out an electrical excitation signal according to the inherent frequency of the oscillating mirror and applies it to an oscillating mirror driving mechanism through a signal line, the oscillating mirror driving mechanism drives the oscillating mirror to deflect in a clockwise or counterclockwise direction, the scan controller outputs a beam switch signal to the laser light source, and the laser beam emitted by the laser light source is reflected by the oscillating mirror to form a continuous scan line segment on the projection plane; and
during alignment, constructing a first scan line and a second scan line;
matching, by the scan controller, the first scan line to a clockwise scan stage of the oscillating mirror and matching the second scan line to a counterclockwise scan stage of the oscillating mirror, scanning sequentially pixels on the first and second scan line on the projection plane; detecting a relative position of the first scan line and the second scan line and adjusting a phase difference parameter of the scan controller according to the relative position of the first scan line and the second scan line.