CPC G01B 7/20 (2013.01) [B60C 23/041 (2013.01); B60C 23/0483 (2013.01); B60C 23/064 (2013.01); G01L 1/16 (2013.01); G01L 17/005 (2013.01); B60C 2019/004 (2013.01); B60C 23/20 (2013.01); H01Q 1/2241 (2013.01)] | 4 Claims |
1. A measuring device comprising:
a first sensor provided on a surface of an object to be measured,
a case provided to ensure that the first sensor is located between the case and the object to be measured,
an elastic body interposed between the case and the object to be measured, and
a processing circuit which is provided inside the case and processes the output signal of the first sensor, wherein
the first sensor includes a strain sensor,
the strain sensor is a chip comprising a thin film piezoelectric element, the chip is mounted on a flexible substrate by wire bonding, and the flexible substrate has a wire connection part to which a wire extending to the outside is connected, and
a metal foil having a thickness of 20 μm or less is formed on a surface of the flexible substrate on a side opposite from the chip, and the metal foil includes at least a part corresponding to the direct back side part of the chip.
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