US 12,235,094 B2
Confocal measuring apparatus for 3D measurement of an object surface
Korbinian Prause, Buchenberg (DE); and Michael Layh, Altusried (DE)
Assigned to Hochschule für angewandte Wissenschaften Kempten Körperschaft des öffentlichen Rechts, Kempten (DE)
Appl. No. 17/784,047
Filed by Hochschule für angewandte Wissenschaften Kempten Körperschaft des öffentlichen Rechts, Kempten (DE)
PCT Filed Dec. 30, 2020, PCT No. PCT/EP2020/088020
§ 371(c)(1), (2) Date Jun. 9, 2022,
PCT Pub. No. WO2021/140052, PCT Pub. Date Jul. 15, 2021.
Claims priority of application No. 10 2020 200 214.2 (DE), filed on Jan. 9, 2020.
Prior Publication US 2023/0003514 A1, Jan. 5, 2023
Int. Cl. G01B 11/24 (2006.01)
CPC G01B 11/24 (2013.01) 12 Claims
OG exemplary drawing
 
1. A confocal measuring apparatus (1; 31) for 3D measurement of an object surface (2),
having a light source (4) for generating measuring light (5),
having a lens array (12) having a plurality of array lenses (13),
having a hyperchromatic telescope (14) imaging an object plane (16) into an arrangement plane (15) of the lens array (12),
having a multiplexer optics (11) arranged at a distance of a total of a focal length (fAL) of the array lenses (13) and a focal length (fMO) of the multiplexer optics (11), downstream of the lens array (12) in a beam path of the measuring light (5) which emanates from the object plane (16), and
having a single pinhole aperture (10), which is arranged at a distance of the focal length (fMO) of the multiplexer optics (11), downstream of the multiplexer optics (11) in the beam path of the measuring light (5), which emanates from the object plane (16);
having a collimation optics (8) which is arranged downstream of the single pinhole aperture (10) in the beam path of the measuring light (5) emanating from the object plane (16);
having a spatially resolved detection device (24) which is arranged downstream of the collimation optics (8) in the beam path of the measuring light (5) emanating from the object plane (16),
having a beam splitter (7) arranged between the light source (4) and the single pinhole aperture (10); and
having a further beam splitter (22) for dividing the measuring light (5) into two measuring light partial beams (5A, 5B),
a first of the two measuring light partial beams (5A) being directed onto a first detector array (23), and
a second of the two measuring light partial beams (5B) being directed onto a further detector array (26),
wherein the multiplexer optics (11) is arranged between the lens array (12) and the single pinhole aperture (10), and
wherein the single pinhole aperture (10) serves as a multiplexer for spatial filtering of the beam paths of all individual channels of the measuring light beam path assigned to the respective array lenses (13).