US 12,234,829 B2
Vacuum pump and adjustment method
Taiki Nishimura, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Filed by SHIMADZU CORPORATION, Kyoto (JP)
Filed on Jul. 4, 2024, as Appl. No. 18/764,264.
Claims priority of application No. 2023-116265 (JP), filed on Jul. 14, 2023.
Prior Publication US 2025/0020133 A1, Jan. 16, 2025
Int. Cl. F04D 19/04 (2006.01); F04D 29/058 (2006.01)
CPC F04D 19/048 (2013.01) [F04D 19/042 (2013.01); F04D 29/058 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A vacuum pump comprising:
a rotatable rotor;
a housing configured to house the rotor;
a magnetic bearing having a first magnet arranged at a periphery of a magnet holder fixed to the housing and a second magnet arranged in the rotor to face the first magnet in a radial direction; and
an adjustment member configured to adjust a position of the first magnet relative to the second magnet,
the adjustment member having:
a main body portion having, in an inner peripheral surface thereof, a second thread shape to be fitted in a first thread shape formed at the periphery of the magnet holder and moved in a direction along a rotation axis of the rotor by rotating relative to the magnet holder to adjust the position of the first magnet relative to the second magnet, and
a protrusion protruding from an upper surface of the main body portion, and
the protrusion having, on an outer peripheral side of the main body portion, a contact target surface contactable with a first tool configured to rotate the main body portion from an upper-surface side of the main body portion and contactable with a second tool configured to rotate the main body portion from a side-surface side of the main body portion.